Soitec Leverages Core Technologies to Address Wafer-Level 3D Integration
Company's Extensive and Flexible Platform is Ideally Suited for Maximizing 3D Integration's Advantages in IC Performance, Power, Size and Manufacturing Cost
SAN FRANCISCO, July 13 /PRNewswire-FirstCall/ -- The Soitec Group
(Euronext Paris), the world's leading supplier of silicon-on-insulator (SOI)
and other engineered substrates for the microelectronics industry, announced
today its strategy for solving technology challenges in the growing
wafer-level 3D integration market with a family of proven processes and
engineered substrates. The company has the combination of core technology
know-how in wafer bonding and stacking, manufacturing infrastructure and
high-volume experience, as well as strong IP to develop the building blocks
required for wafer-level 3D integration. Soitec's 3D technology strategy is
built on three pillars: Low-temperature Smart Cut(TM) technology, Smart
Stacking(TM) technology and metal-to-metal direct bonding, currently in
development.
"3D integration and wafer-level packaging technologies are promising and
fast-growing segments of tomorrow's semiconductor industry. We expect 3D
integrated semiconductors to grow at a CAGR of 50 to 60% during the period
2008 to 2015, mainly driven by memories, image sensors, MEMS, analog and CMOS
logic applications," said Jerome Baron, principal analyst at Yole
Developpement. "Despite the current economic downturn, the worldwide R&D
activities linked to 3D integration innovation have reached unprecedented
levels."
"We are working on making 3D technologies feasible and cost effective
with an extensive and flexible offer. At the wafer level, both our Smart
Stacking and Smart Cut technologies add significant value to 3D integration,"
said Andre-Jacques Auberton-Herve, president of the Soitec Group. "And when
SOI wafers are used for CMOS processing, as demonstrated with imagers, end
products are benefiting from higher yields and improved reliability."
Smart Stacking technology enables wafer-to-wafer level stacking of
partially or fully processed circuits. The technique uses low-temperature
oxide-oxide molecular bonding with specific surface conditioning, and
high-precision wafer thinning. The low-stress wafer bonding process remains
compatible with future requirements for submicron alignment accuracy. This
technology is adapted for advanced semiconductor applications such as
Back-Side Illumination (BSI) image sensors as well as via last 3D integration
approaches. Using SOI as starting material, Soitec's technologies allow the
successful stacking of extra-thin layers needed to achieve the highest
through-silicon-via (TSV) interconnect densities.
Soitec's low-temperature Smart Cut process uses oxide-oxide molecular
bonding and atomic-level cleaving to transfer mono-crystalline silicon films
as thin as 0.1 micron onto partially or fully processed wafers. On this new
material layer, a second level of devices can be processed and this
integration can be repeated in an iterative mode. Transferring an extremely
thin layer enables higher interconnect density, higher signal throughput and
simpler TSV processing. Benefits include increased computing bandwidth, lower
overall manufacturing cost, and power savings due to the reduced wiring
distance between connected devices. This final benefit is well suited for
producing advanced memory or CMOS logic 3D IC systems.
Additionally, Soitec's R&D work in metal-to-metal bonding in partnership
with CEA/Leti (the Electronics and Information Technology Laboratory of the
French Atomic Energy Commission) plays a key role in the company's 3D
integration strategy. This approach presents the advantages of applying no
additional pressure on the bonding stack and a lower thermal budget to guard
against distortion and misalignment. The main application is in creating
interconnections in the 3D stack during bonding.
At SEMICON West, July 14-16 in San Francisco, visit Soitec in booth #5448
in North Hall.
About the Soitec Group:
The Soitec Group is the world's leading innovator and provider of the
engineered substrate solutions that serve as the foundation for today's most
advanced microelectronic products. The group leverages its proprietary Smart
Cut(TM) technology to engineer new substrate solutions, such as
silicon-on-insulator (SOI) wafers, which became the first high-volume
application for this proprietary technology. Since then, SOI has emerged as
the material platform of the future, enabling the production of higher
performing, faster chips that consume less power.
Today, Soitec produces more than 80 percent of the world's SOI wafers.
Headquartered in Bernin, France, with two high-volume fabs on-site, Soitec
has offices throughout the United States, Japan and Taiwan, and a new
production site in the process of customers' qualification in Singapore.
Two other divisions, Picogiga International (Les Ulis) and Tracit
Technologies (Bernin), complete the Soitec Group. Picogiga delivers advanced
substrates solutions, including III-V epiwafers and gallium nitride (GaN)
wafers, to the compound material world for the manufacture of high-frequency
electronics and other optoelectronic devices. Tracit, on the other hand,
provides thin-film layer transfer technologies used to manufacture advanced
substrates for power ICs and microsystems, as well as generic circuit
transfer technology , Smart Stacking for applications such as image sensors
and 3D-integration.
Shares of the Soitec Group are listed on Euronext Paris. For more
information, visit http://www.soitec.com.
Soitec, Smart Cut, Smart Stacking and UNIBOND are trademarks of S.O.I.TEC
Silicon On Insulator Technologies.
Press Contact (available also during SEMICON West on site):
Camille Darnaud-Dufour
Tel (France): +33-6-79-49-51-43
E-mail:camille.darnaud-dufour@soitec.com